Implant isolation of ZnO

Kucheyev, S. O.; Jagadish, C.; Williams, J. S.; Deenapanray, P. N.K.; Yano, Mitsuaki; Koike, Kazuto; Sasa, Shigehiko; Inoue, Masataka; Ogata, Ken Ichi

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Implant isolation of ZnO

Date

2003-03-01

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Abstract

Ion-irradiation-induced electrical isolation in n-type singal-crystal ZnO epilayers was analyzed. Emphasis was on improving the thermal stability of isolation. The temperature dependence of sheet resistance was also analyzed. The analysis showed that effective levels associated with irradiation-produced defects in ZnO crystals were shallow.

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https://dspace-test.anu.edu.au/handle/1885/733757856

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DevOps Pure Testing

Source

Journal of Applied Physics

Type

Article

DOI

10.1063/1.1542939

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Implant isolation of ZnO

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