Implantation induced optical losses in GaAs/AlGaAs distributed Bragg mirrors

Abstract

The oxygen implantation induced optical damage was studied using an n-type modulation doped, graded composition mirror, grown by low pressure metallorganic chemical vapor deposition (MOCVD). This mirror design, commonly used in vertical cavity surface emitting lasers (VCSEL), consisted of 35 pairs of 43.2 nm of Al 0.2Ga 0.8As and 51.3 nm of Al 0.9Ga 0.1As, separated by a 20 nm graded composition layer with linear grading. The optical damage caused by oxygen implantation in n-type Bragg mirrors were compared. Proton damage causes less optical loss and this loss is easier to anneal. The reflectivity of the proton implanted material is recovered well after short anneals at moderate temperatures. Show more