Ion Beam Induced Amorphous-Crystalline Phase Transition in Si: Quantitative Approach

Titov, A I; Kucheyev, Sergei

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Ion Beam Induced Amorphous-Crystalline Phase Transition in Si: Quantitative Approach

Date

2000

Authors

Titov, A I

Kucheyev, Sergei

Publisher

Elsevier

URI

http://hdl.handle.net/1885/89885

Collections

Open Access Research

Source

Nuclear Instruments and Methods in Physics Research: Section B

Type

Journal article

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Ion Beam Induced Amorphous-Crystalline Phase Transition in Si: Quantitative Approach

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