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On the Pulsed Anodic Oxidation of n + -InP

Date

Authors

Deenapanray, Prakash

Martin, Anthony H

Lever McGowan, Penelope

Jagadish, Chennupati

Publisher

Electrochemical Society Inc

Abstract

We have performed a parametric investigation of the anodic oxidation of highly doped n-type InP(100) using a pulsed current source. Approximately 75% of the oxide growth took place within the first ∼ 10 s of oxidation, and the equilibrium oxide thicknes

Keywords

Keywords: Anodic oxidation; Atomic force microscopy; Current density; Semiconductor doping; Semiconductor quantum wells; Anodization; Semiconducting indium phosphide

URI

http://hdl.handle.net/1885/91642

Collections

Open Access Research

Source

Electrochemical and Solid-State Letters

Type

Journal article

DOI

10.1149/1.1477295

Restricted until

2037-12-31

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