Progress on the fabrication of on-chip, integrated chalcogenide glass (ChG)-based sensors

Abstract

This paper reviews ongoing progress on the material design, fabrication and performance of high-Q chalcogenide glass resonators utilizing cavity-enhancement for high sensitivity MIR chemical sensing. These structures have been fabricated in thermally evaporated As- and Ge-based chalcogenide glass films with PDMS (polydimethylsiloxane) micro-fluidic channels using standard UV lithography. Discussed are findings that demonstrate that our novel chalcogenide-based micro-fluidic device can be used as highly sensitive refractive index sensors. Show more