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CONTINUOUS WAVE INCOHERENT LIGHT SOURCES (CWILS) AND SEMICONDUCTOR PROCESSING.

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1983

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We present selected examples of CWILS applied to semiconductor processes. For silicon we present preliminary finding of crystallizing layers of polysilicon for thin epitaxial layers, and for interconnections. For gallium arsenide the simultaneous activation, contact and interconnect formation utilizing in part thermomigration which is also achieved with a CWILS.

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https://dspace-test.anu.edu.au/handle/1885/733732063

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DevOps Pure Testing

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