Nickel germanide formation via solid phase epitaxial regrowth of amorphous germanium

Johnson, B. C.; Leong, M.; Kandasamy, S.; Holland, A.; McCallum, J. C.

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Nickel germanide formation via solid phase epitaxial regrowth of amorphous germanium

Date

2010

Authors

Abstract

The effect of Ni on the kinetics of solid phase epitaxial re-crystallization of amorphous germanium films is investigated with Raman spectroscopy. Both Ni implantation and deposition are employed.