Semico nductor gas sensors

Tricoli, Antonio; Righettoni, Marco; Teleki, Alexandra

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Semico nductor gas sensors

Date

2010-10-11

Authors

Tricoli, Antonio

Righettoni, Marco

Teleki, Alexandra

Abstract

Sense and sensitivity: Dry processes allow the rapid and scalable synthesis of nanostructured metal oxide films for use as semiconductor-based gas sensors. Dense, particulate, or porous films, with thicknesses in the nm-μm range can be prepared by the appropriate synthesis and deposition method. A wide variety of oxides with controlled properties (see pictures) are obtained, allowing miniature sensing devices with improved sensitivity and stability to be developed.