Development of a metrological scanning probe microscope as a primary standard for nanoscale dimensional measurement

Abstract

We present an overview of the design of the metrological scanning probe microscope (mSPM) currently under development at the National Measurement Institute Australia (NMIA) and report on preliminary results on the characterization of key components. The mSPM is developed as part of the nanometrology program at NMIA and will provide dimensional measurements made at the nanometer scale that are traceable to the realization of the SI meter at NMIA. The design of the mSPM follows metrological principles to achieve accurate position measurement, over an addressable measurement volume of 100 μm × 100 μm × 25 urn, with a target combined uncertainty of 1 nm. It minimizes uncertainty contributions from deformation of the frame, alignment errors and effects of environmental fluctuations. It incorporates a quartz tuning fork (QTF) detector and a high-performance heterodyne laser interferometrysystem. Show more