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Density limit in helicon discharges

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To produce the highest possible density in a helicon discharge, two helical antennas were used to launch m = +1 waves colliding at the midplane. With 2 kW of RF power on each antenna, a maximum plasma density of 8 × 1013 cm-3 was achieved, not much higher than with a single antenna. This density limit is explained by gas depletion, and a method to avoid this is suggested.

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Plasma Sources Science and Technology

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