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Bohm Velocity With a Two-Temperature Distribution of Negative Particles

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A one-dimensional simulation of a low-pressure RF-driven discharge is used to verify the theoretical predictions of the Bohm velocity of ions at the sheath edge for a two-temperature electron distribution. They indicate that the Bohm velocity is geared to the cooler species, provided that it contains most of the electrons. A similar comparison has also been performed for an electronegative plasma.

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IEEE Transactions on Plasma Science

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