Vertically-Coupled Micro-Ring Resonator in Hydrogenated Amorphous Silicon

Choi, Duk Yong; Gai, Xin; Luther-Davies, Barry; Cheng, Jun

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Vertically-Coupled Micro-Ring Resonator in Hydrogenated Amorphous Silicon

Date

2016

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Abstract

We demonstrated vertically coupled, hydrogenated amorphous silicon ring resonators by leveraging low temperature deposition of the material where SU-8 polymer was employed as planarization layer and resonator gap material.

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https://dspace-test.anu.edu.au/handle/1885/733743787

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DevOps Pure Testing

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Optics InfoBase Conference Papers

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Conference article

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Vertically-Coupled Micro-Ring Resonator in Hydrogenated Amorphous Silicon

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