Effects of hydrogen on the transition layers between diamond films and Zr, Hf substrates

Abstract

Highly purified polycrystalline wafers of Zr and Hf were chosen as substrates for diamond deposition by means of the d.c. arc discharge plasma CVD method. Polycrystalline diamond films were formed on both substrates. Scanning electron microscopy and high resolution X-ray diffraction were used to investigate the surface morphology of the diamond films and the composition of the interface layers between the diamond films and substrates. The experiments showed that the transition layer between the diamond films and Zr substrates was ZrC, ZrH and ZrC0.32H1.2. For Hf substrates, in addition to HfC, it is supposed that there were also some hydrides or carbohydrides in the transition layer, because several X-ray reflections appeared which could not be assigned to Hf, HfC or diamond. Show more