Thermal stability of the passivation of phosphorus diffused silicon surfaces by PECVD silicon nitride

Tan, Jason; Cuevas, Andres; Winderbaum, Saul; Roth, Kristin

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Thermal stability of the passivation of phosphorus diffused silicon surfaces by PECVD silicon nitride

Date

2005

Authors

Tan, Jason

Cuevas, Andres

Winderbaum, Saul

Roth, Kristin

Publisher

WIP-Renewable Energies

URI

http://hdl.handle.net/1885/84488

Collections

Open Access Research

Source

Proceedings of the 20th European Photovoltaic Solar Energy Conference

Type

Conference paper

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Cultural advice

Thermal stability of the passivation of phosphorus diffused silicon surfaces by PECVD silicon nitride

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