Optical Frequency Comb Generation using Low Stress Reactive Sputtered Silicon Nitride Waveguides

Frigg, Andreas; Boes, Andreas; Ren, Guanghui; Nguyen, Thach G.; Choi, Duk Yong; Gees, Silvio; Moss, David; Mitchell, Arnan

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Optical Frequency Comb Generation using Low Stress Reactive Sputtered Silicon Nitride Waveguides

Date

2020

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We demonstrate fully CMOS-compatible anomalous dispersive SiN microring resonators with an intrinsic Q factor of 6.6 × 105 based on reactive sputtering SiN, yielding in a 250 nm wide modulation-instability frequency comb.

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https://dspace-test.anu.edu.au/handle/1885/733727187

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DevOps Pure Testing

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Conference contribution

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Optical Frequency Comb Generation using Low Stress Reactive Sputtered Silicon Nitride Waveguides

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