Low-loss chalcogenide waveguides for chemical sensing in the mid-infrared
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We report the characteristics of low-loss chalcogenide waveguides for sensing in the mid-infrared (MIR). The waveguides consisted of a Ge 11.5As24Se64.5 rib waveguide core with a 10nm fluoropolymer coating on a Ge11.5As24S64.5 bottom cladding and were fabricated by thermal evaporation, photolithography and ICP plasma etching. Over most of the functional group band from 1500 to 4000cm-1 the losses were < 1dB/cm with a minimum of 0.3dB/cm at 2000cm-1. The basic capabilities of these waveguides for spectroscopy were demonstrated by measuring the absorption spectrum of soluble Prussian blue in Dimethyl Sulphoxide.
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Optics Express