Characterisation of defects in electron irradiated Ga-or B-doped CZ Silicon using Laplace DLTS

Abstract

We have measured the electrical and annealing properties of defects created in Czochralski grown Si doped with either B or Ga by electron irradiation using both conventional and Laplace(L)-DLTS. With L-DLTS, we have been able to resolve several defects that cannot be resolved using conventional DLTS. L-DLTS provides a new avenue to study defect introduction rates and annealing kinetics in B- and Ga-doped Si. The isochronal annealing behaviour of the defects was also investigated. Show more