Williams, J. S.Harrison, H. B.2025-03-222025-03-22Scopus:0018685012https://dspace-test.anu.edu.au/handle/1885/733728338Laser annealing has made an impact on device processing. Not only does laser irradiation allow localized heating both in depth and laterally, it offers the possibility of obtaining supersaturated solid solutions of dopant in semiconductors with electrical activities far exceeding those obtainable by furnace annealing.3English1979http://www.scopus.com/inward/record.url?scp=0018685012&partnerID=8YFLogxK