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The measurement of Pb+ ion collection in Si by high depth-resolution Rutherford backscattering

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Pb distributions for 20 keV Pb+ implantations into Si have been measured as a function of dose by glancing angle Rutherford backscattering. For Pb doses in excess of 1015 ions cm-2, Pb accumulation at the target surface has been observed.

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Physics Letters, Section A: General, Atomic and Solid State Physics

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