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Nanoscale Precision of 3D Polymerization via Polarization Control

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Date

2016-08-01

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Abstract

Polarization effects in laser 3D nanolithography are employed to fine-tune the feature sizes in the structuring of photoresist. The vectorial Debye theory is used for modelling and a variation of up to ≈20% in the line width of SZ2080 is shown experimentally for the identical axial extent. This proves polarization to be a variable parameter for voxel-aspect ratio control.

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Keywords

femtosecond pulses, laser nanolithography, optical 3D printing, polarization, voxel-aspect ratios

Citation

URI

https://dspace-test.anu.edu.au/handle/1885/733756592

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DevOps Pure Testing

Source

Advanced Optical Materials

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Article

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DOI

10.1002/adom.201600155

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