Test environment running 7.6.6

Cultural advice

The Australian National University acknowledges, celebrates and pays our respects to the Ngunnawal and Ngambri people of the Canberra region and to all First Nations Australians on whose traditional lands we meet and work, and whose cultures are among the oldest continuing cultures in human history.

Aboriginal and Torres Strait Islander peoples are advised that ANU Library collections may include images, names, voices, and other representations of deceased persons.

Material in the collection may contain terms, language or views that reflect the period in which the item was created and may be considered inappropriate today.

Sputtering Effects in a Helicon Plasma with an Additional Immersed Antenna

Simple item page
dc.contributor.authorAanesland, Ane
dc.contributor.authorCharles, Christine
dc.contributor.authorBoswell, Roderick
dc.contributor.authorFredriksen, A
dc.date.accessioned2015-12-13T23:09:41Z
dc.date.issued2003
dc.date.updated2015-12-12T08:20:19Z
dc.description.abstractA plasma source excited by a double saddle helicon antenna outside the glass vacuum vessel has been modified by inserting a second copper antenna in contact with the plasma through the glass end plate. Both have the same frequency of 13.56 MHz but have a
dc.identifier.issn0963-0252
dc.identifier.urihttp://hdl.handle.net/1885/87115
dc.publisherInstitute of Physics Publishing
dc.sourcePlasma Sources Science and Technology
dc.subjectKeywords: Antennas; Copper; Electrons; Glass; Ion bombardment; Plasma density; Plasmas; Sputtering; Temperature; Vacuum; Glass vacuum vessel; Helicon plasma; Saddle helicon antenna; Plasma sources
dc.titleSputtering Effects in a Helicon Plasma with an Additional Immersed Antenna
dc.typeJournal article
local.bibliographicCitation.issue1
local.bibliographicCitation.lastpage88
local.bibliographicCitation.startpage85
local.contributor.affiliationAanesland, Ane, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationCharles, Christine, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationBoswell, Roderick, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationFredriksen, A, University of Tromso
local.contributor.authoruidAanesland, Ane, u4162172
local.contributor.authoruidCharles, Christine, u4025692
local.contributor.authoruidBoswell, Roderick, u8000743
local.description.embargo2037-12-31
local.description.notesImported from ARIES
local.description.refereedYes
local.identifier.absfor020204 - Plasma Physics; Fusion Plasmas; Electrical Discharges
local.identifier.ariespublicationMigratedxPub16263
local.identifier.citationvolume12
local.identifier.doi10.1088/0963-0252/12/1/311
local.identifier.scopusID2-s2.0-0037294342
local.type.statusPublished Version

Downloads

Original bundle

Now showing 1 - 1 of 1
Thumbnail Image
Name:
01_Aanesland_Sputtering_Effects_in_a_2003.pdf
Size:
131.78 KB
Format:
Adobe Portable Document Format
Download

Collections

Open Access Research

DSpace software copyright © 2002-2026 LYRASIS