Recombination activity of manganese in p- and n-type crystalline silicon
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MacDonald, Daniel
Rosenits, Philipp
Deenapanray, Prakash
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Institute of Physics Publishing
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Silicon wafers implanted with low doses of manganese were annealed at 900 °C to distribute the Mn throughout the sample volume, and were subjected to carrier lifetime measurements. The Mn centres thus introduced were found to decrease the recombination l
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Semiconductor Science and Technology
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2037-12-31
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