Diffusion and Defect formation in Ion Implanted Si nanostructures

Hogg, S M; Kluth, Patrick; Lenk, Stefan; Zhang, Min; Trellenkamp, St; Moers, J; Mantl, Siegfried

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Diffusion and Defect formation in Ion Implanted Si nanostructures

Date

2002

Authors

Hogg, S M

Kluth, Patrick

Lenk, Stefan

Zhang, Min

Trellenkamp, St

Moers, J

Mantl, Siegfried

Publisher

Institute of Electrical and Electronics Engineers (IEEE Inc)

URI

http://hdl.handle.net/1885/36418

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Open Access Research

Source

Proceedings of the 14th International Conference on Ion Implantation Technology. 2002

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Conference paper

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2037-12-31

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Diffusion and Defect formation in Ion Implanted Si nanostructures

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