The chemical state of iron ions implanted into silicon carbide

Abstract

Conversion electron Mössbauer spectroscopy (CEMS) was used to determine the local environment of 57Fe implanted into single crystals of α-SiC at room temperature. Rutherford backscattering ion channeling measurements showed the specimens to be amorphous (random) for all fluences studied (1, 3, and 6 × 1016ions/cm2, 160 keV). The CEMS spectra were fit with a single component having a distribution of quadrupole split values, i.e., a distribution of electric field gradients. The results indicate a distribution of the implanted iron ions among several sites with slightly differing local environments. Show more