Wafer-Scale Functional Metasurfaces on Free-Standing Membranes

Tseng, Ming Lun; Leitis, Aleksandrs; John-Herpin, Aurelian; Kivshar, Yuri S.; Altug, Hatice

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Wafer-Scale Functional Metasurfaces on Free-Standing Membranes

Date

2022

Authors

Tseng, Ming Lun

Leitis, Aleksandrs

John-Herpin, Aurelian

Kivshar, Yuri S.

Altug, Hatice

Abstract

We demonstrate free-standing metasurfaces made by a new wafer-scale and CMOS compatible nanofabrication method and produce nanostructures over large-area transparent oxide membranes. Applications include narrow-band spectral filtering, efficient light focusing, polarization control and optofluidic biosensors.

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https://dspace-test.anu.edu.au/handle/1885/733740284

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DevOps Pure Testing

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Optics InfoBase Conference Papers

Type

Conference article

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Wafer-Scale Functional Metasurfaces on Free-Standing Membranes

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