Influence of pulse duration on the doping quality in laser chemical processing (LCP) - A simulative approach
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Fell, Andreas
Granek, Filip
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Springer
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The laser chemical processing (LCP) technique for the local doping of crystalline silicon solar cells is investigated. Here, a liquid jet containing a dopant source acts as a waveguide for pulsed laser light, which results in the melting and subsequent do
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Applied Physics A: Materials Science and Processing
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2037-12-31
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