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Accurate Depth Profiling Through Energy-Dependent Pulse Height Deficit Compensation in Gas Ionization Detectors

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Date

2002

Authors

Dall (previously Weijers), Tessica
Timmers, Heiko
Elliman, Robert

Journal Title

Journal ISSN

Volume Title

Publisher

Elsevier

Abstract

The impact of the pulse height deficit effect in gas ionization detectors on the accurate extraction of depth information from heavy ion elastic recoil detection spectra has been investigated. Thin GaN films and GexSi1-x/Si heterostructures have been analyzed with a 200 MeV 197Au beam. Employing an empirical parameterisation of the pulse height deficit, a global energy calibration of the detector can be achieved. Energy spectra have been compared, calibrated with either a constant or a full energy-dependent compensation for the deficit. A constant compensation results in significant distortion of the extracted depth profile for heavier ions, whereas an energy-dependent compensation yields true concentration-depth profiles.

Description

Keywords

Keywords: Heavy ions; Heterojunctions; Ion beams; Ionization of gases; Thin films; Elastic recoil detection; Gas ionization detectors; Gas detectors Depth profiling; Detector response; Elastic recoil detector; Gas ionization detectors; Heavy ions; Ion beam analysis

Citation

URI

http://hdl.handle.net/1885/91619

Collections

Open Access Research

Source

Nuclear Instruments and Methods in Physics Research: Section B

Type

Journal article

Book Title

Entity type

Access Statement

License Rights

DOI

10.1016/S0168-583X(01)01310-6

Restricted until

2037-12-31

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01_Dall (previously Weijers)_Accurate_Depth_Profiling_2002.pdf (185.24 KB)

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