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Low loss chalcogenide glass waveguides by thermal nano-imprint lithography

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Date

2010-08-30

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Abstract

We report the fabrication of low loss rib waveguides from chalcogenide glass films by thermal nano-imprint using a soft stamp. Waveguides 2 - 4 μm wide and 1 μm high were fabricated with extremely smooth sidewalls and optical losses limited by Rayleigh scattering to values of 0.26 dB/cm for the TM and 0.27 dB/cm for TE polarizations at 1550nm.

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https://dspace-test.anu.edu.au/handle/1885/733752933

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DevOps Pure Testing

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Optics Express

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Article

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DOI

10.1364/OE.18.019286

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