Collisionless expansion of pulsed rf plasmas

Schröder, T; Grulke, O; Klinger, Thomas; Boswell, Roderick; Charles, Christine

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Collisionless expansion of pulsed rf plasmas

Date

2014

Authors

Schröder, T

Grulke, O

Klinger, Thomas

Boswell, Roderick

Charles, Christine

Publisher

Institute of Physics Publishing

Abstract

This paper presents experimental results of the quasi isothermal expansion of a pulsed rf argon plasma (Prf ≈ 300 W) into a vacuum like environment. A fast (τopen < 200 μs) gas puffing system prevents significant ionization by energetic electron in

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http://hdl.handle.net/1885/77407

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Open Access Research

Source

Journal of Physics D: Applied Physics

Type

Journal article

DOI

10.1088/0022-3727/47/5/055207

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2037-12-31

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Collisionless expansion of pulsed rf plasmas

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