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Ion implanted dielectric films for an improved optical and electronic silicon photovoltaic response

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Authors

Shalav, Avi
Henderson, Christian
Ratcliff, Thomas
Thomson, Andrew

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Conference Organising Committee

Abstract

Over the past few years, ion implanters specifically developed for the high throughput required by the silicon photovoltaic industry, have become commercially available. Recent research and development has focused on the formation of doped surface regions

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Materials Research Society Symposium Proceedings

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Restricted until

2037-12-31