Deformation behavior of ion-irradiated polyimide
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The nanoindentation hardness, young's modulus and deformation behavior of polyimide films were investigated. After irradiation, all samples were subjected to indentation using a UMIS-2000 nanoindentation system with a ∼4.3-μm-radius diamond spherical indenter. Each sample was mounted on a stainless-steel stub using a mounting wax heated to ∼100°C for indentation. The indenter tip and the indentation system were carefully calibrated by indenting fused silica. The results show that ion irradiation increases the hardness and elastic modulus and decreases the tensile strength of polyimides.
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Applied Physics Letters