The application of high-resolution Rutherford backscattering techniques to near-surface analysis

Abstract

Two aspects of high resolution Rutherford backscattering are treated in some detail: (1) the factors which effectively limit the depth-resolution and (2) the application of low-angle backscattering for surface analysis and channelling studies. Both theoretical and experimental estimates of depth resolution are presented and are shown to be in good agreement, suggesting that theoretical estimates may provide a reliable and valuable guide to optimum resolution conditions. The optimization of backscattering geometry for thin film analysis and studies of ion implanted profiles is demonstrated by examples from recent experiments. The possible configurations and advantages of employing low-angle scattering geometries in combination with the channelling technique are also presented and illustrated by appropriate examples. Show more